@article{Khan_M-2021_196830,
title = {MEMS Sensors for Diagnostics and Treatment in the Fight Against COVID-19 and Other Pandemics},
author = {Khan, M. and Tariq, M. and Nawaz, M. and Ahmed, J.},
month = {apr},
year = {2021},
abstract = {As the world is going through an existential global health crisis, i.e., the outbreak of novel coronavirus-caused respiratory disease (Covid-19), the healthcare systems of all the countries require readily available, low cost and highly precise equipment for the rapid diagnostics, monitoring, and treatment of the disease. The performance and precision of this equipment are solely dependent on the sensors being used. The advancement in research and development of micro-electro-mechanical systems (MEMS) based sensors during recent years, has resulted in the improvement of the conventional equipment being used in biomedical and health care applications. Microfluidics (Lab-on-a-chip) and MEMS sensors are now being used extensively for quick and accurate detection, progression monitoring, and treatment of various diseases including Covid-19. The ongoing miniaturization and design improvements have resulted in more precise sensors and actuators for healthcare applications, even for micro and nanoscale measurements in drug delivery and other invasive applications. This article aims at reviewing the MEMS sensors being used or which can be used in the important equipment for the detection and treatment of Covid-19 or other pandemics. An insight into various designs and working principles of the research-based and commercially available MEMS sensors is presented. The study highlights the role and importance of MEMS sensors in the improvement of equipment with conventional sensors. MEMS sensors outperform the conventional sensors due to their small size ( 1 μm-1mm), negligible weight, prompt response, precise measurements, portability, and ease of integration with electronic circuitry.},
pages = {61123-61149},
volume = {9},
journal = {IEEE Access},
publisher = {Institute of Electrical and Electronics Engineers},
url = {https://doi.org/10.1109/access.2021.3073958},
}
